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Summary:To filter out infrared light from the driving light source in the extreme ultraviolet lithography (EUVL) light source system, a rectangular grating structure needs to be fabricated on the surface of the collection mirror. However, the collection mirror grating usually undergoes deformation during the manufacturing process, resulting in a decrease in filtering efficiency. The process errors...
Recently, the research team of the High Power Laser Element Technology and Engineering Department of the Shanghai Institute of Optics and Mechanics, Chinese Academy of Sciences, has made new progress in the study of improving the damage threshold of fused quartz elements through laser cleaning. The study proposes for the first time the use of microsecond pulse CO2 laser cleaning to enhance the dam...
In a groundbreaking scientific study published in Volume 13 of the Scientific Report, researchers reported on the results of Young's double slit interference experiment using oscillating vortex radiation under a photon counting system. The experiment involves using a spiral oscillator to emit second harmonic radiation in the ultraviolet range. Using an ultra narrow bandpass filter in the low curre...
Polytetrafluoroethylene (PTFE) has improved the efficiency and repeatability of nanosecond and picosecond laser processing technologies used in microelectronics and display glass manufacturing. In the field of precision manufacturing, the demand for efficient and repeatable processes is crucial. The laser structure of glass and laser ablation of silicon substrates are key areas where precision p...
Researchers from the University of Stockholm in Sweden, the Nordic Institute for Theoretical Physics, and the University of Cafoscari in Venice, Italy have successfully demonstrated for the first time how lasers induce quantum behavior at room temperature and make non-magnetic materials magnetic. This breakthrough is expected to pave the way for faster and more energy-efficient computers, informat...