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The researchers estimate the period from 2023 to 2028. EUV lithography will address the limitations of traditional optical lithography, which has reached its physical limits in terms of resolution. The shorter wavelength of EUV light allows for the creation of smaller features and tighter patterns on silicon wafers, enabling the manufacture of advanced microchips with greater transistor densities....
近日,从江苏通用半导体有限公司传来消息,由该公司自主研发的国内首套的8英寸碳化硅晶锭激光全自动剥离设备正式交付碳化硅衬底生产领域头部企业广州南砂晶圆半导体技术有限公司,并投入生产。 图:8英寸SiC晶锭激光全自动剥离设备 该设备可实现6英寸和8英寸碳化硅晶锭的全自动分片,包含晶锭上料、晶锭研磨、激光切割、晶片分离和晶片收集,一举填补了国内碳化硅晶锭激光剥离设备领域研发、制造的市场空白,突破了国外的技术封锁,将极大地提升我国碳化硅芯片产业的自主化、产业化水平。 该设备年可剥离碳化硅衬底20000片,实现良率95%以上,与传统的线切割工艺相比,大幅降低了产品损耗,而设备售价仅仅是国外同类产品的1/3。 近年来,碳化硅功率器件在大功率半导体市场中所占的份额不断提高,并被广泛应用于新能源汽车、城市轨道交通、风力发电、高速移动、物联网等一系列领域...
Electro optical modulators (EOMs) are the main components in optical communication networks, which can control the amplitude, phase, and polarization of light through external electrical signals.In order to achieve ultra compact and high-performance EOM, most of today's research focuses on on-chip devices that combine semiconductor technology with state-of-the-art tunable materials. However,...
In a significant advancement in material physics, researchers from Germany and the United States have theoretically demonstrated that only extremely thin materials need to be α- RuCl3 can be placed in an optical cavity to control its magnetic state.This discovery may pave the way for new methods of controlling material properties without the use of strong lasers.The Role of Optical Vacuum W...
Recently, the High Power Laser Physics Joint Laboratory of Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, completed the research of hard X-ray zoom beam splitting imaging on the micro focus X-ray source for the first time, and solved the problem of beam splitter limitation in the hard X-ray band. The related achievements are titled "Bifocal photo scene imaging in the...