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Summary:To filter out infrared light from the driving light source in the extreme ultraviolet lithography (EUVL) light source system, a rectangular grating structure needs to be fabricated on the surface of the collection mirror. However, the collection mirror grating usually undergoes deformation during the manufacturing process, resulting in a decrease in filtering efficiency. The process errors...
The National Science Foundation (NSF) of the United States has awarded the University of Rochester nearly $18 million for three years to design and prototype key technologies for EP-OPAL, a new facility dedicated to studying the interaction between ultra-high intensity lasers and matter.After the design project is completed, the facility can be built at the Laser Energy Laboratory (LLE). This fund...
Recently, NASA's official website showed that a research team at the University of Central Florida has tested an instrument called Ejecta STORM, which aims to measure the size and velocity of surface particles generated by exhaust gases from rocket powered landers on the moon or Mars.According to NASA, when a spacecraft lands on the moon or Mars, rocket exhaust plumes can produce efflorescent ejec...
Semiconductor laser pump sources, especially those with a wavelength of 969nm, have become the preferred choice for high-power/high peak energy disc lasers due to their reduced quantum losses and heat generation.The 3000W 969nm fiber coupled semiconductor laser system launched by BWT uses 800 μ m NA0.22 fiber to output flat top optical energy distribution, combining lightweight and excellent optic...
Recently, American semiconductor equipment manufacturer MKS Instruments announced plans to build a factory in Penang, Malaysia to support the production of wafer manufacturing equipment in the region and globally. This development plan will be divided into three stages to build a new factory, and it is expected to break ground and start construction in early 2025.Why choose to build a factory in M...