Omnitron Announces Partnership with Silex Microsystems to Mass Produce MEMS Scanning Mirrors for LiDAR

According to reports, Omnitron Sensors, a pioneer in the development of MEMS sensing technology for large-scale and low-cost markets, recently announced that it will collaborate with Silex Microsystems, a subsidiary of Semielectronics, to mass produce MEMS scanning mirrors for LiDAR.

Eric Aguilar, co-founder and CEO of Omnitron Sensors, said, "We have noticed a huge demand from manufacturers of advanced driving assistance systems (ADAS), drones, and other robotic systems for low-cost, highly reliable LiDARs.

We have chosen Silex Microsystems, the world's largest pure MEMS foundry, to demonstrate our market readiness to deliver the first batch of MEMS scanning mirrors that can meet the accuracy, reliability, size, cost, and volume requirements of LiDAR in different applications
Concept proof MEMS scanning mirror developed by Omnitron Sensors.

According to Omnitron Sensors, its MEMS scanning mirror can provide 2-3 times the field of view (FoV) compared to other MEMS scanning mirrors currently used in remote LiDAR applications. Its stepper scanning mirror is designed specifically for harsh high vibration automotive environments and drone applications, and LiDAR gyroscopes produced by other suppliers cannot meet the demanding requirements of these applications.

Omnitron Sensors' solution has constructed an electrostatic motor that can move MEMS mirrors and achieve greater unit area force than similar products currently on the market. Aguilar stated that Omnitron Sensors achieved this goal using a 3D MEMS topology, but more importantly, its manufacturability. To ensure a simple and manufacturable process, Aguilar stated that their MEMS scanning mirrors do not use metal springs, but instead use silicon based springs, which have a hardness one thousand times that of the original and will not wear out.

Addressing MEMS Manufacturing Challenges
The challenges of MEMS device manufacturing are well known. Due to issues with the size, reliability, durability, and repeatability of MEMS devices, as well as the uniqueness of each new MEMS device process technology, MEMS manufacturing costs are high and the cycle from design to delivery is slow. The core IP of Omnitron Sensors can address these challenges.

As a new topology of MEMS, Omnitron Sensors' IP has redesigned its manufacturing process and provided support through new packaging technologies. This has accelerated the mass production of various small, low-cost, and precision MEMS devices, from scanning mirrors and inertial measurement units to microphones, pressure sensors, and switches.

Aguilar said: Omnitron Sensors' new MEMS topology, cleverly redesigning silicon process steps and new packaging methods, is an important step forward in the microelectronics industry. It greatly reduces the manufacturing complexity that has limited MEMS growth to date. By utilizing the standard equipment and processes already in place at the Silex Microsystems wafer factory, Omnitron Sensors have cleared the way for fast, large-scale delivery of robust, reliable, and affordable MEMS devices .

Source: Sohu