Overview of ultrafast laser micro nano manufacturing technology: material processing, surface/interface control, and device manufacturing

Researchers from Tsinghua University have summarized the research on ultrafast laser micro nano manufacturing technology, including material processing, surface/interface control, and device manufacturing. The relevant review titled "A Review of Ultrafast Laser Micro/Nano Fabric: Material Processing, Surface/Interface Control, and Device Fabric" was published in Nano Research.

Ultra fast laser processing technology provides a wide range of application opportunities in micro nano manufacturing, nanotechnology, biotechnology, energy science, photonics, and other fields due to its controllable processing accuracy, diverse processing capabilities, and extensive material adaptability. The processing capability and application of ultrafast lasers still need further exploration. In the field of material processing, controlling the atomic scale structure of nanomaterials is challenging. There are complex effects in ultrafast laser surface/interface processing, making it difficult to modulate the nanostructures and properties of the surface/interface as needed. In the process of ultrafast laser manufacturing of micro functional devices, the processing capability urgently needs to be improved. Here, researchers reviewed the research progress of ultrafast laser micro nano manufacturing in areas such as material processing, surface/interface control, and micro functional device manufacturing. Several useful ultrafast laser processing methods and applications in these fields were introduced. Ultra fast laser processing technology has various processing effects and capabilities, and has shown application value in multiple fields from science to industry.

Figure 1 Overview of ultrafast laser micro nano processing structure schematic diagram

Figure 2 Reshaping of Metal Nanomaterials Induced by Ultrafast Laser

Figure 3 Ultrafast laser-induced ablation of metal nanomaterials

Figure 4 Ultra fast laser plasma nanomachining of multifunctional structures with photoresponsive properties

Figure 5 Formation of surface dislocation layer under femtosecond laser irradiation

Figure 6 Laser Induced Coffee Ring Structure for Color Printing

Figure 7 Strong metal carrier interaction induced by ultrafast laser

Figure 8 Ultrafast laser induces bubble enhanced fluorescence in dye solution

Figure 9 Optical Metasurfaces Prepared by Near Field Enhanced Ultrafast Laser Processing Method

Figure 10 Using a multi beam ultrafast laser to fabricate photonic crystals and subwavelength gratings

Figure 11 Preparation of Nanogap Graphene Supercapacitors by Ultrafast Laser Bessel Beam Processing

Figure 12 Ultrafast Laser Induced Carbonization from Carbonation Points

Figure 13 Preparation of hybrid supercapacitors using MoCl5 assisted carbonization method based on ultrafast laser

This article reviews the research progress of ultrafast laser micro nano processing technology in material processing, surface/interface control, and functional device manufacturing. These research results demonstrate the extensive material processing capabilities of ultrafast lasers, from altering the internal atomic structure of nanomaterials to manipulating the properties of material surfaces/interfaces. By adjusting the energy deposition of ultrafast laser processing, different processing effects on nanomaterials can be achieved, including reshaping, ablation, and interconnection. Ultrafast lasers provide an effective method to control the properties of material surfaces/interfaces, thereby achieving the construction of surface structures, impact strengthening, and strong metal carrier interactions. In addition, this technology can also produce micro functional devices, including photonic crystal devices, optical components, and electronic devices. These advances demonstrate the potential of ultrafast laser processing in both scientific and industrial fields. Ultrafast laser processing technology is still rapidly developing and will play a more important role in micro nano manufacturing in the future, bringing changes to multiple application fields.

Source: Yangtze River Delta Laser Alliance